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Disposable Vacuum Viewport Protector

Disposable Vacuum Viewport Protector Princeton Docket #14-3022 Industry and research facilities face unwanted vacuum viewport coating issues. For example, during low temperature plasma experiments, metallic films can develop on vacuum viewports, obscuring observation. The impaired viewports can either be replaced, which is costly, or cleaned. The cleaning...

Published: 3/30/2022 | Inventor(s): Yuan Shi, Yevgeny Raitses

Keywords(s): plasma physics

Category(s): Mechanical/Electrical Engineering