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Disposable Vacuum Viewport Protector
Princeton Docket #14-3022
Industry and research facilities face unwanted vacuum viewport coating issues. For example, during low temperature plasma experiments, metallic films can develop on vacuum viewports, obscuring observation. The impaired viewports can either be replaced, which is costly, or cleaned. The cleaning...
Published: 3/30/2022
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Inventor(s): Yuan Shi, Yevgeny Raitses
Keywords(s): plasma physics
Category(s): Mechanical/Electrical Engineering
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