Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control for Thin Film Deposition

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Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control

for Thin Film Deposition

Princeton Docket # 13-2931-1

Multi-target manipulators are one of the crucial parts in multi-layered film depositions such as Pulsed Laser Deposition (PLD). The complicated motion of the currently manufactured rotary multi-target manipulator prevents the targets from having an effective thermal contact with any type of heat sink, making it difficult to adjust the temperature of the existing multi-target manipulators. Adjustable temperature control of targets is required for some film deposition applications, such as Matrix Assisted Pulsed Laser Evaporation (MAPLE), where cryogenic temperature is needed to freeze organic solutions. To address the need for the temperature adjustable rotary multi-target manipulators, Princeton University researchers have developed a new type of target manipulator.

This new design of target manipulator can translocate as well as rotate multiple targets using a simpler design. The rotatable targets are allowed to be transferred in a linear direction and this translational motion allows increased convenience and flexibility in positioning the targets. Most importantly, this new device  maintains an effective thermal contact between the targets and a  heat sink during the target manipulation,  allowing the temperature of the conductive targets to be adjusted by the conductive  plate as it  is either cooled or heated.

This new type of Linear-Translational Multi-Target manipulator can be used for thin film deposition such as PLD or Ion Beam Deposition (IBD), in which temperature adjustable multiple targets should be both rotatable and transferrable in the deposition process. In addition, it can also be used as temperature-adjustable multiple substrate located at the bottom of a system where target material are deposited.



·         Novel multi-target manipulators for both Pulsed Laser Deposition (PLD) and Ion Beam Deposition (IBD).

·         Temperature-adjustable multiple substrate.



·         Temperature adjustable.

·         Rotatable targets can be transferred in a linear direction.


The Faculty Inventor


Craig Arnold is Associate Professor in the Department of Mechanical and Aerospace Engineering and Associate Director of Academic Affairs in the Princeton Institute for Science and Technology of Materials.  His research primarily focuses on laser processing and transport in materials with particular emphasis on shaping laser-material interactions.  Among many awards and honors Professor Arnold has won are the NSF Career Award (2006) and ONR Young Investigators Award (2005).


Intellectual Property Status

Patent protection is pending.         

Princeton is currently seeking commercial partners for the further development and commercialization of this opportunity.




Michael Tyerech

Princeton University Office of Technology Licensing

(609) 258-6762


Laurie Bagley

Princeton University Office of Technology Licensing 

(609) 258-5579


Patent Information:
For Information, Contact:
Michael Tyerech
former Princeton Sr. Licensing Associate
Princeton University
Hyuncheol Jeong
Craig Arnold
Rodney Priestley
process optimization