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Linear-Translational Multi-Target Manipulator with Adjustable Temperature Control
for Thin Film Deposition
Princeton Docket # 13-2931-1
Multi-target manipulators are one of the crucial parts in multi-layered film depositions such as Pulsed Laser Deposition (PLD). The complicated motion of the currently manufactured rotary multi-target manipulator prevents...
Published: 3/30/2022
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Inventor(s): Hyuncheol Jeong, Craig Arnold, Rodney Priestley
Keywords(s): materials, metamaterials, process optimization
Category(s): Materials
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