Description:
Princeton Docket # 16-3186-1
Researchers at Princeton University, PRISM Imaging and Analysis Center, have developed a new method for scanning probe lithography (SPL).
This method has been developed with non-raster trajectories which can be synthesized by sine and cosine waveforms to drive the scanning process. Compared with the raster scan SPL, non-raster scan with smoother driving waveforms can speed up the fabrication process without exciting traditional scanner’s oscillation at higher-order harmonics. With an existing PID feedback controller, the scan time per frame can be reduced from several minutes to several seconds. Moreover, it provides flexibility in controlling the pattern shape (e.g. circular, elliptical, parabola, capsule, and parallelogram patterns). The scan size, and scan line density of fabrication region can be adjusted by changing the frequency and amplitude parameters of driving waveforms.
This method also offers the preview function in fabrication process and show versatile capabilities with different kinds of nanofabrication methods, such as dip-pen and local anodic oxidation. This invention has potential applications in cost-effective surface modifications, nanolithography, and nanofabrication. The mechanical scratching with this approach has been successfully implemented on monolayer polymer films. And the probe-based triboelectrification on a silicon dioxide surface was also developed using this technique. To verify this method, the resultant morphology of the modified surfaces and the triboelectric charges generated within the tip rubbed region were in-situ characterized by the tapping mode AFM and scanning Kelvin force microscopy, respectively.
Applications
• Cost-effective surface modifications
• Nanolithography
• SPL related nanofabrication
1. Electrodes for energy storage
2. Solar cells
3. Biological sensors
Advantages
• Reduced scan time
• Control over fabrication pattern parameters
• Compatible with all pattern shape
The Faculty Inventor
Yao Nan, Director of the PRISM Imaging and Analysis Center at Princeton University
Dr. Yao’s research has been focused on utilizing advanced imaging, diffraction, spectroscopy and in-situ techniques, in tandem with molecular dynamic simulation, to conduct fundamental studies of the structure-composition-processing-property relationships in complex materials for applications in nanotechnology, energy, environment and health. He has published two books entitled Handbook of Microscopy for Nanotechnology (published in three languages) and Focused Ion Beam System: Basics and Applications. He has also authored 16 book chapters and more than 220 research publications in scientific journals. Dr. Yao is known for his many contributions including in developing the first 300 keV Environmental-cell Transmission Electron Microscope (1991) and on a theoretical explanation for the superior imaging resolution of scanning helium-ion microscopy over the scanning electron microscopy (2008). He serves on the editorial boards of ten professional journals and is on the research proposal advisory committee for NSF, DOE, NIH, NASA, two US National Labs (Oak Ridge and Brookhaven), and European Research Council. Yao has chaired nine international symposia and delivered over thirty invited lectures in recent years.
Intellectual Property & Development status
Patent protection is pending.
Princeton is currently seeking commercial partners for the further development and commercialization of this opportunity.
Contact:
Michael R. Tyerech
Princeton University Office of Technology Licensing
• (609) 258-6762• tyerech@princeton.edu
Xin (Shane) Peng
Princeton University Office of Technology Licensing
• (609) 258-5579• xinp@princeton.edu