Princeton Docket # 16-3186-1Researchers at Princeton University, PRISM Imaging and Analysis Center, have developed a new method for scanning probe lithography (SPL). This method has been developed with non-raster trajectories which can be synthesized by sine and cosine waveforms to drive the scanning process. Compared with the raster scan SPL, non-raster...
Published: 7/9/2024
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Inventor(s): Nan Yao, Wei Cai
Keywords(s): microscopy
Category(s): Mechanical/Electrical Engineering
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