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Use of Hyperthermal Atomic Beam for Low Temperature Diamond Growth
Princeton Docket #14-2959
High quality diamond films, currently grown only at high substrate temperatures, are desirable for their mechanical hardness, thermal conduction, electrical resistivity, durability and optical transparency. A low temperature process to produce such high quality...
Published: 3/30/2022
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Inventor(s): Samuel Cohen, Erik Gilson, Winston Chan
Keywords(s): aerospace, materials, small molecule, thin films
Category(s): Materials
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